High-Performance MEMS Flow Sensor Modules

Solid-state mass flow sensor modules from Renesas measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, Renesas flow sensors deliver excellent abrasive wear resistance and long-term reliability.

Renesas offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.