SFM30xx Series Digital Mass Flow Meters

Sensirion's SFM30xx series digital mass flow meters offer features for measuring flows of air, oxygen, and mixtures of air and oxygen

Image of Sensirion's SFM30xx Series Digital Mass Flow MetersSensirion’s SFM30xx are versatile, low pressure drop, bidirectional flow meters. The SFM3003 is based on the same form factor as the proven SFM3000 series but comes with a larger flow range of up to 300 slm and offers additional features for measuring air, oxygen, and mixtures of air and oxygen. The SFM3003 series is the ideal choice for medical and industrial applications. The SFM3013 is based on the SFM3003 solution but offers superior stability against overpressure. The SFM3013 can be calibrated for Heliox gas mixtures as an option.

Key Characteristics
  • Flow range up to 300 slm
  • Calibrated for O2, air, and mixtures (Heliox available in option for SFM3013)
  • Low pressure drops across the sensor
  • I2C interface
  • No recalibration needed
  • Up to 1 bar gauge pressure (SFM3013)
  • Bidirectional option up to -150 slm (SFM3003)
Benefits of Sensirion’s CMOSens® Technology
  • High reliability and long-term stability
  • Excellent signal-to-noise ratio
  • Industry-proven technology with a track record of more than 15 years
  • Designed for mass production
  • High process capability
  • Scalability

SFM3003 Series Digital Mass Flow Meters

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
DIGITAL (MASS) FLOW METER -150SLSFM3003-300-CEDIGITAL (MASS) FLOW METER -150SL27 - ImmediateView Details
DIGITAL (MASS) FLOW METER -30SLMSFM3003-300-CLDIGITAL (MASS) FLOW METER -30SLM1 - ImmediateView Details

SFM3013 Series Digital Mass Flow Meters

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
DIGITAL (MASS) FLOW METER -30SLMSFM3013-300-CLDIGITAL (MASS) FLOW METER -30SLM7 - ImmediateView Details
DIGITAL (MASS) FLOW METER -30SLMSFM3013-300-CLMDIGITAL (MASS) FLOW METER -30SLM40 - ImmediateView Details

SFM3003 Eval Kit

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
SFM3003 EVAL KITSEK-SFM3003-300-CLSFM3003 EVAL KIT6 - ImmediateView Details

SFM3013 Eval Kit

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
SFM3013 EVAL KITSEK-SFM3013-300-CLSFM3013 EVAL KIT6 - ImmediateView Details
Published: 2021-12-01