ASL Series Datasheet by KEMET

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Built Into Tomorrow
Benefits
High reliability: Realization of MTTF = 36,000 hours at
85°C and 100 V
Stable performance in high temperature
Low power input due to small capacitance
Operating temperature range from -40°C to +150°C
Built-in pre-load mechanism and mounting attachments
allowing for easier installation into equipment
Accurate nanometer positioning
• Minimum mechanical abrasion
Large generated force of 800 N
• Long operational life
• RoHS/REACH compliant
Multilayer Piezoelectric Actuators
ASL Series Metal Sealed 150°C
Overview
Multilayer piezoelectric actuators are ceramic elements
used to convert electrical energy into mechanical energy
such as displacement or force by utilizing the piezoelectric
longitudinal effect.
KEMETs multilayer piezoelectric actuators are produced
based on our unique element structure design and
piezoelectric ceramic materials with high electrostrictive
factors. Compared to conventional piezoelectric
actuators, they are smaller in size but can generate higher
displacements and forces at low voltages.
The ASL Metal Sealed 150°C series actuators are less
impacted by ambient humidity due to insulation from the
atmosphere. As a result, long operational life and high
performance have been attained which are ideal for use in
various high reliability applications such as semiconductor
device production equipment and optical communication
equipment.
Applications
Typical applications include fine adjustment of various X-Y
table steppers, mirror/prism positioning, linear motors, fluid
flow control valve drive, vibration source and manipulators.
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Ordering Information
AS L170 C801 N D 0-A0 LF
Series
Housing
Construction
and Operating
Temperature
Range
Nominal
Displacement
(μm)
Maximum
Voltage
(VDC)
Generated
Force
(N)
Mount
Configuration Drive Block
Configuration New Design Lead Type Environmental
Compliance
AS =
Encapsulated
in Metal Case
L = Bellows
(pre-load),
maximum
operating
temperature of
150°C
The first
two digits
specify the
displacement
values. The
last digit is an
exponent of 10.
Example:
170 = 17 μm
C = 150 The first two
digits specify
the values. The
last digit is an
exponent of 10.
Example:
801 = 800 N =
80 kgf
N = Female
thread type
F = Flange type
W = Witout
flange type
D = V groove
P = Plane
Sequentially
numbered
starting from
zero.
Blank =
Mounting type
A0 = Straight
attached leads
LF = RoHS/
REACH
Compliant
(See
"Environmental
Compliance"
below)
Application Examples
Application Examples
Semiconductor manufacturing system Positioning of stepper, clamping actuator of wire bonding, valve actuation of mass flow
controller, actuator of shaker, actuator of damping system, positioning of light source
Precision machinery, mechatronics Sewing machine, robot, vibration of parts feeder, positioning of equipment, pressure sensor
Home appliances Actuator of pump
Optical equipment Positioning of stage, actuator of autofocusing, actuator of shaker and damping system
Communications Polarization control, wavelength control
Medical equipment Micropump, ultrasonic transducer, manipulators
Measuring instrument Pressure sensor, acceleration sensor, fine positioning
Automotive Vibration Control
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Element Structure
KEMETs multilayer piezoelectric actuators are designed using unique element structure technology and proprietary ceramic
materials with high electrostrictive factors.
Insulator
Internal
electrode
Direction of displacement
External
electrode
Ceramic
This particular structure and technology involved provide a unique product with below advantages compared to other similar
solutions:
Against electromagnetic actuators
Faster response
• Higher resolution for positioning
• Large generated force
Low power consumption
No electromagnetic noise
Against bimorph piezoelectric actuators
7 times the energy conversion efficiency of the bimorph type actuator
Lower power consumption
• Large generated force
Stable displacement, reduced shift and creep phenomena
100 times the response speed of the bimorph piezoelectric actuator
Against stacked piezoelectric actuators
Compact size (less than 1/10 the specific volume of the stacked piezoelectric actuator)
Low drive voltage
Easy to use
• Inexpensive
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Dimensions in mm
Part Number L
(mm)
ASL170C801ND0LF
38.4
ASL340C801ND0LF
58.4
ASL510C801ND0LF
78.4
ASL680C801ND0LF
98.4
Female Thread Type
Part Number L
(mm)
ASL170C801FD0LF
32.4
ASL340C801FD0LF
52.4
ASL510C801FD0LF
72.4
ASL680C801FD0LF
92.4
Flange Type
Part Number L
(mm)
24.4
44.4
64.4
84.4
Without Flange Type
ASL***C801ND0LF ASL***C801FD0LF
Enlarged Section A Enlarged Section A
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Dimensions in mm cont.
ASL***C801WD1-A0LF ASL170C801ND0LF
ASL340C801ND0LF ASL510C801ND0LF
ASL680C801ND0LF ASL170C801FD0LF
Enlarged Section A
Enlarged Section A
Enlarged Section A Enlarged Section A
Enlarged Section A
Enlarged Section A
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Dimensions in mm cont.
ASL340C801FD0LF ASL510C801FD0LF
ASL680C801FD0LF ASL170C801WD1-A0LF
Enlarged Section A Enlarged Section A
Enlarged Section A
Enlarged Section A
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Dimensions in mm cont.
ASL340C801WD1-A0LF ASL510C801WD1-A0LF
ASL680C801WD1-A0LF
Enlarged Section A Enlarged Section A
Enlarged Section A
KEIVIEI' uwsso company When applied with a DC voltage at ambient temperature, When driven by an AC voltage at ambient tem plus temperature rise due to heat generation, Generated Force (Compression Resistance) The lorce required for restricting the displacement to zero when the maximum driving voltage is applied, (=1kHz,V=1Vrms(<10pf) (="120" hz,v="1Vrms(">1DpF) Both ends of the element are in free state, Typical values of the element under our test conditions. Room temperature (3 minutes) At 740°C for 30 minutes Room temperature (3 minu At +150°C for 30 minutes Repetition of 10 cycles oftne above Displacement: Initial value 130%
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Performance Characteristics
Item Performance Characteristics Conditions
Operating Temperature Range −40 to +150°C
When applied with a DC voltage at ambient temperature.
When driven by an AC voltage at ambient temperature
plus temperature rise due to heat generation.
Recommended Storage Condition −5 to +40°C
Maximum Driving Voltage 150 VDC
Displacement See Table 1 - Ratings & Part Number Reference At 150 VDC
Generated Force
(Compression Resistance)
See Table 1 - Ratings & Part Number Reference
The force required for restricting the displacement to zero
when the maximum driving voltage is applied.
Capacitance See Table 1 - Ratings & Part Number Reference
f = 1 kHz, V = 1 Vrms (< 10 µF)
f = 120 Hz, V = 1 Vrms (> 10 µF)
Capacitance Tolerance ±20%
Dissipation Factor 5% or less
Insulation Resistance See Table 1 - Ratings & Part Number Reference Value obtained in one minute at 150 VDC.
Resonance Frequency See Table 1 - Ratings & Part Number Reference
Both ends of the element are in free state.
Typical values of the element under our test conditions.
Airtightness 1 X 10−8 atm cc/second or less
Temperature Cycle Test
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
tan δ: Less than initial rated value
Insulation Resistance: 1 MΩ or more
Room temperature (3 minutes)
At -40°C for 30 minutes
Room temperature (3 minutes)
At +150°C for 30 minutes
Repetition of 10 cycles of the above
High Temperature Shelf Test
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
tan δ: Less than initial rated value
Insulation Resistance: 1 MΩ or more
Temperature: 150 ±2°C
Time: 1,000 ±48 hours
Solvent Resistance Test
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
tan δ: Less than initial rated value
Insulation Resistance: 1 MΩ or more
Appearance: No noticeable defect
Mark: Easily legible
Solvent: Isopropyl alcohol
Temperature: 23 ±5°C
Time: Immersion for 1 minute
Heat Resistance Test
Displacement: Initial value ±30%
Capacitance: Initial value ±30%
tan δ: Less than initial rated value
Insulation Resistance: 1 MΩ or more
Appearance: No noticeable defect
Mark: Easily legible
Temperature: 150 ±3°C
Time: 96 ±4 hours
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9© KEMET Electronics Corporation • KEMET Tower • One East Broward Boulevard P0104_ASL 9/23/2020
Fort Lauderdale, FL 33301 USA • 954-766-2800 • www.kemet.com
Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Environmental Compliance
All KEMET Multilayer Piezoelectric Actuators are RoHS and REACH Compliant.
Article 33(1) of the REACH Regulation states that manufacturers and importers of articles (products) are required to notify
their customers of the presence of any Substances of Very High Concern (SVHC) in their products exceeding 0.1% by weight
and provide instructions on safe use of the product.
KEMET Corporation reports regarding the Article 33(1) of REACH Regulation as follows:
1. Applicable Product:
Multilayer piezoelectric actuators (AE, ASB, ASL and AHB Series).
2. Report for content of REACH SVHC list:
The product(s) above contain a substance by more than 0.1wt% per product weight that was published in the 8th update of
the REACH SVHC substances (December 19, 2012).
3. Regarding safety of the multilayer piezoelectric actuators (Piezoceramic products):
The Piezoceramic that is used in this product becomes ceramic by sintering powder containing PZT as a main ingredient.
It is chemically stable, with minimum risks toward the human body or environment within the intended use of the product.
Please note that risks could occur in the case of inhalation or accidental oral uptake of powder ceramics.
4. Technical product information on the multilayer piezoelectric actuators (Piezoceramic products):
The manufacturing technique of the “piezoceramic products” whose main ingredient is Lead Titanium Zirconium Oxide
(PZT) has been established, and there is no alternative material that can exhibit superior performance than PZT at this
moment. Please note that the piezoceramic is listed as an exempt on RoHS (2011/65/EU) Annex III (7c.1).
5. Responsibility of piezoceramic manufacturers:
Piezoceramic manufacturers report information regarding PZT containment in their products to the customers to obey the
article 33 of the REACH regulation.
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10© KEMET Electronics Corporation • KEMET Tower • One East Broward Boulevard P0104_ASL 9/23/2020
Fort Lauderdale, FL 33301 USA • 954-766-2800 • www.kemet.com
Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Table 1 – Ratings & Part Number Reference
Part Number
Electrical Energy/Power Physical
Capacitance
(µF)
Resonance
Frequency
(kHz)
Insulation
Resistance
(MΩ)
Generated
Force
(N)
Displacement
(µm)
at Maximum
Voltage of
150 VDC
Type Weight
(g)
ASL170C801ND0LF 1.3 14 30 800 19 ±3 Female Thread 46
ASL340C801ND0LF 2.6 12 15 800 39 ±6 Female Thread 50
ASL510C801ND0LF 3.9 10 10 800 58 ±9 Female Thread 56
ASL680C801ND0LF 5.1 8 5 800 77 ±12 Female Thread 61
ASL170C801FD0LF 1.3 14 30 800 19 ±3 Flange 50
ASL340C801FD0LF 2.6 12 15 800 39 ±6 Flange 54
ASL510C801FD0LF 3.9 10 10 800 58 ±9 Flange 61
ASL680C801FD0LF 5.1 8 5 800 77 ±12 Flange 65
ASL170C801WD1-A0LF 1.3 32 30 800 19 ±3 Without Flange 12
ASL340C801WD1-A0LF 2.6 18 15 800 39 ±6 Without Flange 16
ASL510C801WD1-A0LF 3.9 12 10 800 58 ±9 Without Flange 22
ASL680C801WD1-A0LF 5.1 9 5 800 77 ±12 Without Flange 27
Custom Design Parts
Customized parts are available on request. Please contact KEMET.
Below guidelines can be used as reference regarding generated displacement and generated force.
Item Characteristics
Displacement Roughly proportional
to the length of the element
Generated Force Roughly proportional
to the sectional area of the element
Product Cross Section 1 x 1 mm square or larger
Product Length 1 mm or longer
Product Shape Available in cylindrical ring or other
shapes
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Electrical Characteristics
ASL Series Performance Comparison with ASB Series
Figure 1 - Temperature vs. Displacement
Figure 2 - Temperature vs. Capacitance
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Electrical Characteristics cont.
Voltage vs. Displacement Generated force vs. Displacement Temperature vs. Displacement
ASL170C801ND0LF
ASL340C801ND0LF
ASL510C801ND0LF
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13© KEMET Electronics Corporation • KEMET Tower • One East Broward Boulevard P0104_ASL 9/23/2020
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Electrical Characteristics cont.
Voltage vs. Displacement Generated force vs. Displacement Temperature vs. Displacement
ASL680C801ND0LF
ASL170C801FD0LF
ASL340C801FD0LF
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Fort Lauderdale, FL 33301 USA • 954-766-2800 • www.kemet.com
Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Electrical Characteristics cont.
Voltage vs. Displacement Generated force vs. Displacement Temperature vs. Displacement
ASL510C801FD0LF
ASL680C801FD0LF
ASL170C801WD1-A0LF-
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15© KEMET Electronics Corporation • KEMET Tower • One East Broward Boulevard P0104_ASL 9/23/2020
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Electrical Characteristics cont.
Voltage vs. Displacement Generated force vs. Displacement Temperature vs. Displacement
ASL340C801WD1-A0LF
ASL510C801WD1-A0LF
ASL680C801WD1-A0LF
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Packaging
Part Type Packaging Type Pieces per Box
ASL***ND0LF
Tray 1
ASL***FD0LF
ASL***WD1-A0LF 10
Reliability
The majority of failure modes on multilayer piezoelectric actuators are short-circuits due to degraded insulation. Although
the cause of degradation of insulation has not been clarified, it has been found that the failure rate varies greatly between
static uses (DC voltage application) and dynamic uses (pulse voltage application). Like other electrical components,
piezoelectric actuators can be affected by humidity as well as applied voltage and ambient temperature. KEMET has added
the metal sealed piezoelectric actuators featuring high reliability by eliminating the effects of the ambient atmosphere.
This section describes reliability guidelines for static and dynamic usage of the metal sealed type actuators. Reliability of
our multilayer piezoelectric actuators is represented by MTTF (mean time to failure) in case of static usage. The number of
repetitions is considered to represent the reliability in the case of dynamic usage.
DC Voltage Application
MTTFr of the metal sealed type under the actual operating conditions is calculated from the reference MTTFs and the
acceleration factor as it is in the case of the resin coated type. However, since the internal element is sealed from the
atmosphere, it is not affected by the atmospheric humidity. Therefore, equation (1) below is used.
(1) MTTFr = MTTFs × Av × At
MTTFr : Estimated value
MTTFs : Reference value (= 36,000 hours)
Av: Acceleration factor for drive voltage = (100/VR)2 VR: Actual voltage (V)
At: Acceleration factor for ambient temperature = 1.5(85 -Tr)/10 TR Actual ambient temperature (°C)
The following calculation is made for the case of use at 25°C and 150 V.
MTTFr = 36,000 × (100/150)2 × 1.5(85-25)
= 36,000 × 0.44 × 11.3
≈ 179,000 hours (20.4 years)
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Reliability cont.
Pulse Voltage Application
Similarly to the resin coated type, it is extremely difficult to estimate reliability for the metal sealed type products by using
an equation.
In KEMETs testing on the ASB170C801NP0, there was no failure confirmed up to 1,000 hours (equivalent to 100 million
pulses applied) under the conditions below:
Temperature: 85 ±2°C
Humidity: 90 to 95% RH
Load: 200 N to 500 N (20 kgf to 50 kgf)
Drive voltage waveform: rectangular wave, 30 Hz, 0 to 100 V, duty ratio at 30%
User’s Guide
Fixing Method
Carefully prevent the piezoelectric actuators from being bent, twisted or applied tensile force.
Reference: Twisting and Tension Tolerance
Reference Value Remarks
Twisting Force 3 × 10−1 N • m or less For an actuator which generates a force
of 800 N (compression resistance).
Tension
50 N or less
Install the actuator so that the center axis of the generated displacement is aligned with the center axis of the load.
Epoxy-based adhesives are recommended for bonding. Select adhesives that have high rigidity and allow for medium
thickness so that the generation force and displacement cannot be deteriorated. Also, do not form adhesives on the side
of the actuator.
When thermosetting resin is used, perform polarizing treatment (see caution section) after the adhesive is settled.
The resin coated type is weak to the tensile force due to its structure and may be broken when tensile forces are applied
onto the device. Using the device in the state that constantly applies compression is effective against any mechanical
damage. The pressure applied to this element should be kept at 20% to 50% of the force generated by this element
(compression resistance).
Install the element so that the axis of generated displacement is vertical to the mounting surface.
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
User’s Guide cont.
Female Thread Type Fixing Method Flange Type Fixing Method
Without Flange Type Fixing Method
Driving Method
Connect the red lead wire to the positive (+) terminal of the power supply. Also prevent reverse voltage application.
In driving applications, it is necessary to take consideration of hysteresis, ringing, creep, and other similar phenomenons.
For pulse driving, it is also necessary to be aware of self-heat generation, charge/discharge current, and the power
supplys impedance.
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
User’s Guide cont.
Generated Force and Load Relation
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2015.02.06 9470MPAVOL08E1501H1
Generated force and load relation:
Static load: Initial position (0V position) is dropped
by spring constant but total displacement has the
same value under static load.
Spring load (Fluctuating load): Displacement
is changed by relation between generated
force and spring constant of actuator.
Static load: No load value change when actuator moves.
Fluctuating load: Load value changes by spring reaction when actuator moves.
10
5
0
5
10
15
20
Displacement(μm
20
15
10
5
0
5
10
15
20
Displacement(μm
400N static load is applied
Zero point shift.
Total displacement is not changed.
Model: AE0505D16
100 1500
0 200 400 600 800 1000
50
Voltage(V)
Load(N)
0V
150V
400N
M
M
Piezo Actuator
0
150
10008006004002000
100500
2
4
6
8
10
12
14
16
18
20
Displacement(μmDisplacement(μm
Voltage(V)
Load(N)
Spring load of 14.3N/μm
Spring load of
14.3N/μm
Reduction of displacement
Model: AE0505D16
Load-Displacement
line of actuator
Displacement loss
Reduction of displacement
0
2
4
6
8
10
12
14
16
18
20
Piezo Actuator
Multilayer Piezoelectric Actuators Vol.08 25
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
Handling Precautions
Precautions to be taken when using multilayer piezoelectric actuators
(Please read these precautions before using our products)
1. Before using or designing a system using our products, read the precautions and specifications listed below.
2. The main failures with multilayer piezeoelectric actuators are deterioration of insulation resistance, short-circuit, and
open-circuit.
Before using the products, design systems should be designed carefully to ensure redundancy, prevention of the spread of
fire, and prevention of faulty operation allowing for the occurrence of failures.
3. Use the products after checking the working conditions and rated performance of each multilayer piezoelectric actuator
series.
Selection of AE series (resin coated type) or ASB, ASL or AHB Series (metal sealed type) should be based on the intended
working temperature and humidity.
Connect the red lead wire to the positive (+) terminal of the power
supply.
Avoid electric shocks since a high voltage is in use.
Never apply excessive tension to a lead wire.
Do not handle the product by picking up or moving the lead wire.
Machining of the actuator element and replacement of the lead wire are
prohibited.
Do not handle the resin coated type (AE series) with bare hands.
Do not wash the resin coated type (AE series) with organic solvents.
Avoid excessive physical shock. Otherwise, the internal piezoelectric
ceramic element may be damaged.
If the actuator is exposed to high temperatures above 100°C or if used
after long storage periods (more than three months), the device should
be polarized by using the circuit configuration and conditions shown at right.
Do not apply voltage exceeding maximum rating voltage, or rapid charging and discharging.
Do not use the actuator in high concentrations of highly inflammable gas.
Align the center axis of displacement of the actuator with the center axis of the mechanical load.
When operated, the transient response time of the actuator should be less than 1/3 of the resonant frequency in order to
prevent damage by ringing.
Store the metal sealed type preferably in a dry atmosphere (desirably below 40% RH) at ordinary temperatures (-5˚C to
+4C). Avoid condensation on the product’s surface.
Store actuators where there is no vibration.
Handle products properly as industrial waste. When disposing, please contact your local waste disposal service and make
sure the disposal methods meet all legal requirements.
fi
fi


󱛠 Connect the red lead wire to the positive  terminal of the power supply.
󱛠 Carefully avoid electric shock since a high voltage is in use.
󱛠 Never apply excessive tension to a lead wire. Do not handle the product by picking up or moving the lead wire.
󱛠 Do not disassemble the case of the metal sealed type.
󱛠 Machining of the actuator element and replacement of the lead wire are prohibited.
󱛠 Do not handle the resin-coated type AE series with bare hands. Otherwise, the reliability of the element
would be degraded.
󱛠 Do not wash resin-coated type AE series by organic solvant.
󱛠 Avoid excessive physical shock resulting from, for example, dropping. Otherwise, the internal piezoelectric ceramic
element may be damaged.
󱛠 If the actuator is exposed to high temperature above 100 or if it is used after long storage period more
than three months, it should be polarized by using the circuit confi guration and conditions shown below.
Precautions
R1
Protective resistor R11k
Protective resistor R21k
Polarizing conditions: DC voltage application
0V1500.2V (to be retained for 10 seconds) 0
R
2
PA
S
V
󱛠 Do not apply voltage exceeding maximum rating voltage, or do not do rapid charging and discharging.
These might lead to degradation of the reliability or mechanical fracture.
󱛠 Do not use the actuator in high concentration of highly infl ammable gas. Otherwise, ignition may occur.
󱛠 Use the actuator so as not to cause bending, twisting or tension. Furthermore, align the center axis of displacement
of the actuator with the center axis of the mechanical load.
󱛠 Drive the actuator so that the rising speed is more than three times as much as the resonance period in
order to prevent the device from damaging by ringing.
󱛠 Store the resin-coated type AE series preferably in a dry atmosphere desirably below 40% RH at ordinary
temperatures  5 to 40˚C. Avoid condensation on the product surface.
󱛠 Store actuators where there is no vibration.
󱛠 These products must be handled properly as industrial waste. When disposing, please contact your local waste
disposal service.
󱛠Piezo actuator is industrial wastes, make sure disposal method under the laws.
26 Multilayer Piezoelectric Actuators Vol.08
KEIVIEI' «WEED-mm
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Multilayer Piezoelectric Actuators – ASL Series Metal Sealed 150°C
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checking and verifying the extent to which the Information contained in this publication is applicable to an order at the time the order is placed. All Information given
herein is believed to be accurate and reliable, but it is presented without guarantee, warranty, or responsibility of any kind, expressed or implied.
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