HAF Series Analog Datasheet by Honeywell Sensing and Productivity Solutions

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Honeywell
Honeywell ZephyrTM
Analog Airflow Sensors
HAF Series–High Accuracy
±50 SCCM to ±750 SCCM
Datasheet
2sensing.honeywell.com
What makes our sensors better?
Fast response time
Wide range of airflows
Customizable flow ranges and configurable package styles
Linear output
High stability
Low pressure drop
Honeywell ZephyrTM Analog Airflow Sensors
HAF Series - High Accuracy
Honeywell Zephyr™ HAF Series sensors provide an analog interface for reading airflow over specified full-scale flow and
compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are
available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated
and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).
The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a
temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides analog
outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films
of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to
provide repeatable response to flow.
Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability
to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards
TIGHT TOTAL ERROR BAND • fAsT REspONsE TIME • WIDE RANGE Of AIRfLOWs
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FAST RESPONSE TIME*
Allows a customer’s application to respond quickly to airflow change, important in
critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications.
WIDE RANGE OF AIRFLOWS*
Zephyr measures mass flow at standard flow ranges of ±50, ±100 ±200, ±400
or ±750 SCCM, or custom flow ranges, increasing the options for integrating the
sensor into the application.
CUSTOMIZABLE FLOW RANGES AND CONFIGURABLE PACKAGE
STYLES*
Meet specific end-user needs.
FULL CALIBRATION AND TEMPERATURE COMPENSATION
Typically allow customer to remove additional components associated with signal
conditioning from the PCB, reducing PCB size as well as costs often associated
with those components (e.g., acquisition, inventory, assembly).
LINEAR OUTPUT*
Provides more intuitive sensor signal than the raw output of basic airflow sensors,
which can help reduce production costs, design, and implementation time.
LOW PRESSURE DROP*
Typically improves patient comfort in medical applications, and reduces noise and
system wear on other components such as motors and pumps.
0.049 %FS RESOLUTION
Increases ability to sense small airflow changes, allowing customers to more
precisely control their application.
LOW 3.3 VDC OPERATING VOLTAGE OPTION AND LOW POWER
CONSUMPTION
Allow for use in battery-driven and other portable applications.
SMALL SIZE
Occupies less space on PCB, allowing easier fit and potentially reducing production
costs; PCB size may also be reduced for easier fit into space-constrained
applications.
ROHS-COMPLIANT MATERIALS
Meet Directive 2002/95/EC.
*Competitive Differentiator
Features
and Benefits
4sensing.honeywell.com
MEDICAL
ANESTHESIA DELIVERY MACHINES
VENTRICULAR ASSIST DEVICES (HEART PUMPS)
NEBULIZERS
OXYGEN CONCENTRATORS
PATIENT MONITORING SYSTEMS (RESPIRATORY MONITORING)
SLEEP APNEA MACHINES
SPIROMETERS
VENTILATORS
LAPAROSCOPY
INDUSTRIAL
AIR-TO-FUEL RATIO
FUEL CELLS
GAS LEAK DETECTION
VAV SYSTEM ON HVAC SYSTEMS
GAS METERS
HVAC FILTERS
Potential Applications
5
sensing.honeywell.com
±50 SCCM to ±750 SCCM
CAUTION
IMPROPER USE
Do not use these products to sense liquid flow
Failure to comply with these instructions may result in
product damage.
Table 1. Absolute Maximum Ratings1
Characteristic Parameter
Supply voltage -0.3 Vdc to 6.0 Vdc
Voltage on I/O output pin -0.3 Vdc to Vsupply
Storage temperature range -40 °C to 125 °C [-40 °F to 257 °F]
Maximum flow change 5.0 SLPM/s
Maximum common mode pressure 25 psi at 25 °C [77 °F]
Maximum flow 10 SLPM
1Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical
characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at
absolute maximum ratings.
CAUTION
PRODUCT DAMAGE
Do not disassemble these products.
Failure to comply with these instructions may result in
product damage.
Table 2. Operating Specifications
Characteristic Parameter Note
Supply voltage
3.3 Vdc
5.0 Vdc
3.3 Vdc ±10%
5.0 Vdc ±10%
Power:
3.3 Vdc
5.0 Vdc
40 mW max.
65 mW max.
1
Compensated temperature range 0 °C to 50 °C [32 °F to 122 °F] 2
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F]
Accuracy See Table 3. 3, 4
Total Error Band (TEB) See Table 3. 4, 5
Null accuracy ±0.1 %FS S 4, 6
Response time 1 ms typ. 7
Resolution 12 bit
Warm-up time 15 ms 8
Calibration media gaseous nitrogen 9
Null stability ±0.06 %FSS max. deviation from null output after 1000 hrs at 25 °C
Reverse polarity protection no
1Maximum power: Is measured under the conditions of the highest supply voltage, Vsupply + 10%, 70 °C, full scale flow and with the minimum load specified for
that supply voltage.
2Custom and extended compensated temperature ranges are possible. Contact Honeywell for details.
3Accuracy: The maximum deviation from the nominal output over the compensated flow range at a reference temperature of 25 °C. Errors include offset, span,
non-linearity, hysteresis and non-repeatability.
4Full Scale Span (FSS): The algebraic difference between the output at the forward Full Scale (FS) flow and the output at the reverse FS flow. Forward flow is
defined as flow from P1 to P2 as shown in Figure 9. The references to mass flow (SCCM) refer to gas flows at the standard conditions of 0 °C and atmospheric
pressure 760 (101.3 kPa).
5Total Error Band: The maximum deviation in output from the ideal transfer function over the entire compensated temperature and flow range. Includes all errors
due to offset, full scale span, flow hysteresis, flow repeatability, thermal effect on offset, thermal effect on span and thermal hysteresis.
6Null accuracy: The maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This includes offset
errors, thermal airflow hysteresis and repeatability errors.
7Response time: The time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected
by the pneumatic interface).
8Warm-up time: The time to the first valid flow measurement after power is applied.
9Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options.
6sensing.honeywell.com
Honeywell ZephyrTM Analog Airflow Sensors
HAF SeriesHigh Accuracy
Table 3. Bidirectional Forward Flow Optimization
Sensor
Range
(SCCM)
Accuracy Error Band Total Error Band
Applied Flow
(SCCM)
Error
(%FSS)
Applied Flow
(SCCM)
Error
(%FSS)
±50
-50 to -14.3 ±7% reading -50 to -11.3 ±9% reading
-14.3 to 0 ±1 -11.1 to 0 ±1
00±0.32 00±0.32
0 to 20 ±1 0 to 11.1 ±1
20 to 50 ±5% reading 11.1 to 50 ±9% reading
±10 0
-100 to -11.1 ±9% reading -100 to -8.3 ±12% reading
-11.1 to 0 ±0.5 -8.3 to 0 ±0.5
00±0.16 00±0.16
0 to 16.7 ±0.5 0 to 16.7 ±0.5
16.7 to 100 ±6% reading 16.7 to 100 ±6% reading
±2001
-200 to -6.7 ±15% reading -200 to -6.7 ±15% reading
-6.7 to -0 ±0.25 -6.7 to -0 ±0.25
00±0.1 00± 0.1
0 to 40 ±0.25 0 to 22.2 ±0.25
40 to 200 ±2.5% reading 22.2 to 200 ±4.5% reading
±400
-400 to -32 ±10% reading -400 to -32 ±12% reading
-32 to -0 ±0.4 -32 to -0 ±0.45
00±0.1 00± 0.1
0 to 80 ±0.4 0 to 60 ±0.45
80 to 400 ±4.0% reading 60 to 400 ±6% reading
±750
-750 to -25 ±15% reading -750 to -25 ±15% reading
-25 to -0 ±0.25 -25 to -0 ±0.25
00±0.1 00± 0.1
0 to 37.5 ±0.25 0 to 37.5 ±0.25
37.5 to 750 ±10% reading 37.5 to 750 ±10% reading
1The short port sensors are only specified down to -100 SCCM.
Error (%FSS)
Airflow (SCCM)
See table below for null accuracy.
Error (%FSS)
Airflow (SCCM)
See table below for null accuracy.
J 3.3:»?3 35:0 me_a:<>
7
sensing.honeywell.com
±50 SCCM to ±750 SCCM
Table 4. Suggested Load
Characteristic Parameter
Minimum suggested resistance:
3.3 Vdc
5.0 Vdc
3.3 kOhm
5 kOhm
Maximum suggested capacitance:
3.3 Vdc
5.0 Vdc
10 nF
10 nF
Table 5. Environmental Characteristics
Characteristic Parameter
Humidity 0% to 95% RH, non-condensing
Shock 100 g, 11 ms
Vibration 15 g at 20 Hz to 2000 Hz
ESD Class 3B per MIL-STD 883G
Table 6. Wetted Materials
Characteristic Parameter
Covers high temperature polymer
Substrate PCB
Adhesives epoxy
Electronic
components silicon, gold
Compliance RoHS, WEEE
Table 7. Recommended Mounting and Implementation
Characteristic Parameter
Mounting screw:
size
torque
5-40
0,68 N m [6 in-lb]
Silicon tubing for long port style 70 durometer; size 0.125 in inside diameter, 0.250 in outside diameter silicone tubing
O-ring:
for short port style
for long port style
AS568A, Size 7, Silicone, Shore A 70
AS568A, Size 10, Silicone, Shore A 70
Filter 5-micron filter upstream of the sensor
Figure 2. Nominal Analog Output
-150.00%
Flow (%FS)
Analog Output (%Vsupply)
-100.00% -50.00%0.00% 50.00%100.00% 150.00%
0.00%
20.00%
40.00%
60.00%
100.00%
80.00%
120.00%
CAUTION
LARGE PARTICULATE DAMAGE
Use a 5-micron filter upstream of the sensor to keep media
flow through the sensor free of condensing moisture and
particulates. Large, high-velocity particles or conductive
particles may damage the sensing element.
Failure to comply with these insturctions may result in
product damage.
8sensing.honeywell.com
Honeywell ZephyrTM Analog Airflow Sensors
HAF SeriesHigh Accuracy
Figure 4. Nomenclature and Order Guide
Figure 5. All Available Standard Configurations
LF: Long port, fastener mount SF: Short port, fastener mount SS: Short port, snap mount
HAF
Product Series
0200
Flow Range2
B
S
Bidirectional
forward flow
optimized
Bidirectional
symmetric
Flow
Direction
B
Honeywell ZephyrTM Analog Airflow Sensors, HAF Series-High Accuracy,
±50 SCCM to ±750 SCCM, Product Nomenclature
Notes:
1. The long port style with the snap mount housing style is not a valid configuration.
2. The 200 SCCM flow range is available in the long and short port styles.
3. Apart from the general configuration required, other customer-specific requirements are also possible.
Please contact Honeywell.
For example, a HAFBLF0200CAAX5 part number defines a Honeywell Zephyr
TM
Analog Airflow Sensor, bidirectional forward flow optimized, long port, fastener
mount, 200 SCCM, analog output, 10% to 90% transfer function, 5.0 Vdc supply voltage.
HAF Series
High Accuracy
Airflow Sensor S
F
F
Housing
Style
Fastener
mount
Snap
mount1
S
L
L
Port Style
Long port1
Short port
C
C
Unit
SCCM X
X
Reserved for
Future Use
XXXXX
A
A
Transfer
Function
10% to 90% of Full
Scale Output (FSO)
5
3
5
Supply
Voltage
3.3 Vdc
5.0 Vdc
0050
0100
50 long port
style only
100 long port
style only
0200 200 long or
short port
0400 400 long port
style only
0750 750 long port
style only
A
Output
Format
AAnalog
1
The Long Port Port Style with the Snap Mount Housing Style is not a valid configuration.
2
The 200 SCCM Flow Range is available in the Long and Short Port Styles.
Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell.
Figure 3. Ideal Transfer Function
V=V0.5 +0.4 F
F
os
A
FS
Where:
VO= output voltage of the device
VS= supply voltage measured at the device
FA = flow applied across the device
FFS = full scale flow specified for the device
F=
FV/V -0.5
A
FS os
32211 / 2 a. AONIEV no.0 2%me 5. o Aowzc: no.5 2335
9
sensing.honeywell.com
±50 SCCM to ±750 SCCM
Figure 7. Long Port Style Flow vs Pressure
N
Flow
(SCCM)
Typical Pressure Drop
mbar inH2OPa
-750 -0.2517 - 0.1011 -25.17
-550 - 0 .14 99 -0.0602 -14.99
-400 -0.0891 -0.0358 -8.91
-300 -0.0578 -0.0232 -5.78
-200 -0.0321 -0.0129 -3.21
-10 0 - 0 .0114 -0.0046 -1.14
-50 -0.0035 -0.0014 -0.35
-20 -0.0007 -0.0003 -0.07
00.0000 0.0000 0.0000
20 0.0007 0.0003 0.07
50 0.0035 0.0014 0.35
100 0.0014 0.0046 0.14
200 0.0321 0.0129 3.21
300 0.0578 0.0232 5.78
400 0.0891 0.0358 8.91
550 0.14 99 0.0602 14.99
750 0.2517 0.1011 25.17
Figure 8. Short Port Style Flow vs Pressure
N
Flow
(SCCM)
Typical Pressure Drop
mbar inH2OPa
-200 -1.1707 -0.470 -117. 07
-150 -0.7074 -0.284 -70.74
-10 0 -0.3562 - 0.14 3 -35.62
-50 - 0.1120 -0.045 -11.20
00.0000 0.000 0.0000
50 0.1196 0.048 11.9 6
100 0.3462 0.139 34.62
150 0.7149 0.287 71.49
200 1.2589 0.452 125.89
-750 -600 -150-450 -300 75
0
600150 4503000
-0.12
-0.06
0
0.06
0.12
Flow (SCCM)
Pressure Drop (inH
2
O)
Pressure Drop (inH
2
O)
Flow (SCCM)
20
0
-200
-0.6
-0.4
-0.2
0
0.2
0.4
0.6
0-505
01
50-150 100-100
Figure 6. Wave Solder Profile
020406080100
0
50
100
150
200
250
300
Time (s)
Temperature (°C)
Max. temp. = 243 °C
Max. temp. = 205 °C
Housing temp. (top of device)
Pin temp. (bottom of device)
Me 34+Aa p4 Im %~c 360a L W, 153ng , 2 SENSOR FooTPmNT vwEwED mm TERM‘NAL 5qu 7i??? 3M ’L J, SENSOR r ooTPRwT ‘ \AEWED rRoM TERM‘NAL 5on
10 sensing.honeywell.com
Honeywell ZephyrTM Analog Airflow Sensors
HAF SeriesHigh Accuracy
Figure 9. Mounting Dimensions (For reference only: mm [in].)
LF: Long port, fastener mount
SF: Short port, fastener mount
Mounting Footprint
Mounting Footprint
7(50,1$/6,'(

3,0
[0.12]
2,00 TYP.
[0.079]
MODEL NUMBER
LOT CODE
10,3
[0.40]
10,00
[0.39]
3,50
[0.14]
6,50
[0.26]
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
36,00
[1.42]
7,20
[0.28]
12,70
[0.50]
AIRFLOW DIRECTION, PORT SIDE
2X DIA. 3,40
[0.13]
1,00
[0.04]
7,20
[0.28]
2X DIA. 5,35
[0.21]
Honeywell Zephyr™
HAFBLFXXXXXXXXX
0x123456789
6(1625)22735,17
9,(:(')5207(50,1$/6,'(
;32576
4X DIA. 0,812
[0.032]
7,20
[0.28]
18,00
[0.71]
36,00
[1.42]
2X DIA. 3,40
[0.134]
7(50,1$/6,'(
1234
3,0
[0.12]
2,00 TYP.
[0.079]
MODEL NUMBER
LOT CODE
10,3
[0.40]
2,50
[0.10]
3,50
[0.14]
6,50
[0.26]
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
36,00
[1.42]
7,20
[0.28]
12,70
[0.50]
AIRFLOW DIRECTION, PORT SIDE
2X DIA. 3,40
[0.13]
1,00
[0.04]
7,20
[0.28]
Honeywell Zephyr™
HAFBSFXXXXXXXXX
0x123456789
2X DIA. 4,00
[0.16]
6(1625)22735,17
9,(:(')5207(50,1$/6,'(
;32576
4X DIA. 0,812
[0.032]
7,20
[0.28]
18,00
[0.71]
36,00
[1.42]
2X DIA. 3,40
[0.134]
2x HD V‘i 221m TERMINAL SIDE PO
11
sensing.honeywell.com
±50 SCCM to ±750 SCCM
Figure 9. Mounting Dimensions (For reference only: mm [in], continued.)
SS: Short port, snap mount
10
Table 8. Pinout
Pin 1 Pin 2 Pin 3 Pin 4
Vout Vsupply GRground NC
Mounting Footprint
;32576
6(1625)22735,17
9,(:(')5207(50,1$/6,'(
26,00
[1.024]
22,0
[0.866]
2X DIA. 2,2 [0.086] THRU
HOLES FOR MOUNTING
3,80
[0.150]
4,00
[0.157]
2X 2,50
[0.098]
2X 7,20
[0.28]
0,65
[0.026]
4X DIA. 0,812
[0.032]
7(50,1$/6,'(

MODEL NUMBER
LOT CODE
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
12,70
[0.50]
10,3
[0.40]
2,50
[0.10]
4,80
[0.19]
3,3
[0.13]
2,00 TYP.
[0.079]
1,00
[0.04]
3,00
[0.12]
12,8
[0.50]
26,00
[1.02]
1,80
[0.071]
6,50
[0.26]
10,40
[0.41]
7,20
[0.28] 4,60
[0.18]
AIRFLOW DIRECTION, PORT SIDE
22,00
[0.87]
Honeywell Zephyr
HAFBSSXXXXXXXXX
0x123456789
DIA. 2,30
[0.09]
Honeywell
ADDITIONAL INFORMATION
The following associated literature is available at sensing.honeywell.com:
 •Productlineguide
 •Productpartlisting/nomenclaturetree
 •Productrangeguide
 •TechnicalInformation:
Gas Media Compatibility and Correction Factors
 •InstallationInstructions
 •Applicationspecificinformation
WARRANTY/REMEDY
Honeywell warrants goods of its manufacture as being free of
defective materials and faulty workmanship. Honeywell’s standard
product warranty applies unless agreed to otherwise by Honeywell
in writing; please refer to your order acknowledgement or consult
your local sales office for specific warranty details. If warranted
goods are returned to Honeywell during the period of coverage,
Honeywell will repair or replace, at its option, without charge
those items it finds defective. The foregoing is buyer’s sole
remedy and is in lieu of all other warranties, expressed or
implied, including those of merchantability and fitness for
a particular purpose. In no event shall Honeywell be liable
for consequential, special, or indirect damages.
While we provide application assistance personally, through our
literature and the Honeywell website, it is up to the customer to
determine the suitability of the product in the application.
Specifications may change without notice. The information we
supply is believed to be accurate and reliable as of this issue;
however, we assume no responsibility for its use.
WARNING
PERSONAL INJURY
DO NOT USE these products as safety or emergency stop
devices or in any other application where failure of the product
could result in personal injury.
Failure to comply with these instructions could result in
death or serious injury.
WARNING
MISUSE OF DOCUMENTATION
• Theinformationpresentedinthisproductsheetisfor
reference only. Do not use this document as a product
installation guide.
• Completeinstallation,operation,andmaintenance
information is provided in the instructions supplied with
each product.
Failure to comply with these instructions could result in
death or serious injury.
32308685-A-EN IL50
June 2015
2015 Honeywell International Inc. All rights reserved.
Sensing and Control
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Golden Valley, MN 55422
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